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NA 095

DIN Standards Committee Safety Design Principles

About NASG Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Technical rule [CURRENT]

VDI 2083 Blatt 13.2
Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications

Title (German)

Reinraumtechnik - Qualität, Erzeugung und Verteilung von Reinstwasser - Mikroelektronik und andere technische Anwendungen

Edition 2009-01

Original language German , English

Price from 123.60 €

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Table of contents

PDF (DE,EN)

Economic benefits

DIN SPEC

Why do standards cost money?

Get involved in standardization

Terminology

DIN Standards Committee Safety Design Principles

VDI 2083 Blatt 13.2 Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications

VDI 2083 Blatt 13.2
Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications