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NA 027

DIN Standards Committee Optics and Precision Mechanics

About NAFuO Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

DIN 32565 [Withdrawn] references following documents:

Document number	Edition	Title
DIN 32564-1	2004-05	Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology More

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DIN SPEC

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Terminology

DIN Standards Committee Optics and Precision Mechanics

DIN 32565 [Withdrawn] references following documents: