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NA 027

DIN Standards Committee Optics and Precision Mechanics

About NAFuO Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

DIN 32564-3
Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport

Title (German)

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 3: Handhabung, Lagerung und Transport

Document: references other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems

Edition 2004-05

Original language German

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Table of contents

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Terminology

DIN Standards Committee Optics and Precision Mechanics

DIN 32564-3 Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport

Document: references other documents

Responsible national committee

Lisa Henigin

DIN 32564-3
Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport