NA 027

DIN Standards Committee Optics and Precision Mechanics

Standards [CURRENT]

DIN 32564-1
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology

Title (German)

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems  

Edition 2004-05
Original language German
Price from 49.20 €
Table of contents

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