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NA 027

DIN Standards Committee Optics and Precision Mechanics

About NAFuO Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

DIN 32564-1
Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology

Title (German)

Fertigungsmittel für Mikrosysteme - Begriffe - Teil 1: Allgemeine Begriffe der Mikrosystemtechnik

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 027-03-03 AA - Production equipment for microsystems

Edition 2004-05

Original language German

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Table of contents

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