NA 027
DIN Standards Committee Optics and Precision Mechanics
DIN 32567-1 [CURRENT] referenced in following documents:
| Document number | Edition | Title |
|---|---|---|
| DIN 32567-4 | 2015-06 | Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 4: Specimen for optical procedures More |
| DIN 32567-5 | 2015-06 | Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 5: Derivation of correction values for optical measuring devices More |
