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NA 027

DIN Standards Committee Optics and Precision Mechanics

About NAFuO Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Technical rule [CURRENT]

VDI/VDE 2655 Blatt 1.2
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

Title (German)

Optische Messtechnik an Mikrotopografien - Kalibrieren von konfokalen Mikroskopen und Tiefeneinstellnormalen für die Rauheitsmessung

Edition 2010-10

Original language German , English

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Table of contents

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DIN Standards Committee Optics and Precision Mechanics

VDI/VDE 2655 Blatt 1.2 Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement

VDI/VDE 2655 Blatt 1.2
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement