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Hydrogen Technologies Standards form the basic framework for market ramp-up
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Climate change Standards and specifications support climate targets
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Smart Farming Standards and specifications are drivers for the digitalization of agriculture
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Publications of NA 027-03-03 AA

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DIN 32561	2012-10	Standards	Production equipment for microsystems - Tray - Dimensions and tolerances More	Order from DIN Media
DIN 32563	2002-03	Standards	Production equipment for microsystems - System for classification of components for microsystems More	Order from DIN Media
DIN 32564-1	2004-05	Standards	Production equipment for micro-systems - Terms and definitions - Part 1: General terms of micro-system technology More	Order from DIN Media
DIN 32564-2	2004-05	Standards	Production equipment for micro-systems - Terms and definitions - Part 2: Basic technologies and production More	Order from DIN Media
DIN 32564-3	2004-05	Standards	Production equipment for micro-systems - Terms and definitions - Part 3: Handling, storage and transport More	Order from DIN Media
DIN 32566	2007-12	Standards	Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring More	Order from DIN Media
DIN 32567-1	2015-06	Standards	Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences More	Order from DIN Media
DIN 32567-2	2014-10	Standards	Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 2: Specimen for tactile procedures More	Order from DIN Media
DIN 32567-3	2014-10	Standards	Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices More	Order from DIN Media
DIN 32567-3	2024-11	Draft standard	Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices More	Order from DIN Media

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