NA 134
VDI/DIN-Commission on Air Pollution Prevention (KRdL) - Standards Committee
Technical rule
[CURRENT]
VDI 2083 Blatt 17
VDI 2083 Blatt 17
Cleanroom technology - Compatibility of materials with the required cleanliness
Title (German)
Reinraumtechnik - Reinheitstauglichkeit von Werkstoffen