NA 054
DIN Standards Committee Plastics
Standards
[CURRENT]
DIN 50451-3
DIN 50451-3
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Determination of 31 elements in high-purity nitric acid by ICP-MS
Title (German)
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 3: Bestimmung von 31 Elementen in hochreiner Salpetersäure mittels ICP-MS
Document: references other documents
Responsible national committee
NA 062-02-21 AA - Testing of process materials for semiconductor technology