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NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

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Standards [Withdrawn]

DIN EN 62047-1
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2005); German version EN 62047-1:2006

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 1: Begriffe und Definitionen (IEC 62047-1:2005); Deutsche Fassung EN 62047-1:2006

Document: referenced in other documents

Responsible national committee

DKE/K 631 - Halbleiterbauelemente  

Responsible international committee

IEC/TC 47 - Semiconductor devices  

Edition 2006-10
Original language German
Price from 106.30 €
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