NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

Technical rule [CURRENT]

IEC/TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Title (German)

Nanotechnoogien - Ein Leitfaden zur Bestimmung der Dicke nanoskaliger Filme mit Hilfe von Ellipsometrie

Responsible national committee

DKE/K 141 - Nanotechnologie  

Responsible international committee

ISO/TC 229/JWG 2 - Measurement and characterization  

Edition 2021-03
Original language English
Price from 166.50 €
Table of contents

Contact

Elena Rongen

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63069 Offenbach am Main

Tel.: +49 69 6308-429

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