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NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

About DKE Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Technical rule [CURRENT]

IEC/TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Title (German)

Nanotechnoogien - Ein Leitfaden zur Bestimmung der Dicke nanoskaliger Filme mit Hilfe von Ellipsometrie

Responsible national committee

DKE/K 141 - Nanotechnologie

Responsible international committee

ISO/TC 229/JWG 2 - Measurement and characterization

Edition 2021-03

Original language English

Price from 166.50 €

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Table of contents

PDF (EN)

Contact

Elena Rongen

Merianstr. 28
63069 Offenbach am Main

Tel.: +49 69 6308-429

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Economic benefits

DIN SPEC

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Terminology

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

IEC/TR 63258 Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Responsible national committee

Responsible international committee

Elena Rongen

IEC/TR 63258
Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films