NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Technical rule
[CURRENT]
VDI 2083 Blatt 9.1
VDI 2083 Blatt 9.1
Cleanroom technology - Compatibility with required cleanliness and surface cleanliness
Title (German)
Reinraumtechnik - Reinheitstauglichkeit und Oberflächenreinheit