NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Standards
[CURRENT]
IEC 60050-523
IEC 60050-523
International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical devices
Title (German)
Internationales Elektrotechnisches Wörterbuch - Teil 523: Bauelemente der Mikrosystemtechnik