NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

Standards [CURRENT]

DIN EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016); German version EN ISO 14644-14:2016

Title (German)

Reinräume und zugehörige Reinraumbereiche - Teil 14: Bewertung der Reinraumtauglichkeit von Geräten durch Partikelkonzentration in der Luft (ISO 14644-14:2016); Deutsche Fassung EN ISO 14644-14:2016

Overview

This standard links the cleanroom classification of air cleanliness by particle concentration to the suitability of equipment for use in cleanrooms and associated controlled environments. This standard specifies a methodology to assess the suitability of equipment (for example, machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 μm to equal to or larger than 5 μm (given in ISO 14644-1).

Document: references other documents

Document: referenced in other documents

Responsible national committee

NA 041-02-21 AA - Cleanroom technology (Mirror committee CEN/TC 243 and ISO/TC 209)  

Responsible european committee

CEN/TC 243 - Cleanroom technology  

Edition 2017-01
Original language German
Translation English
Price from 99.10 €
Table of contents

Contact

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