NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
DIN EN 62047-16 [CURRENT] references following documents:
| Document number | Edition | Title |
|---|---|---|
| IEC 62047-21 | 2014-06 | Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials More |
