NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
DIN EN 62047-22 [CURRENT] references following documents:
| Document number | Edition | Title |
|---|---|---|
| IEC 62047-2 | 2006-08 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials More |
| IEC 62047-3 | 2006-08 | Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing More |
| IEC 62047-8 | 2011-03 | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films More |
