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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

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Standards [CURRENT]

DIN EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials (IEC 62047-21:2014); German version EN 62047-21:2014

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 21: Prüfverfahren zur Querkontraktionszahl von Dünnschichtwerkstoffen der Mikrosystemtechnik (IEC 62047-21:2014); Deutsche Fassung EN 62047-21:2014

Document: references other documents

Responsible national committee

DKE/K 631 - Halbleiterbauelemente  

Edition 2015-04
Original language German
Price from 91.80 €
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Table of contents

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