NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Standards
[CURRENT]
DIN EN 62047-20
DIN EN 62047-20
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 62047-20:2014); German version EN 62047-20:2014
Title (German)
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 20: Gyroskope (IEC 62047-20:2014); Deutsche Fassung EN 62047-20:2014