NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Pre-standard
IEC/TS 62622
IEC/TS 62622
Nanotechnologies - Description, and measurement of dimensional quality parameters of artificial gratings
Title (German)
In der Nanotechnologie verwendetet künstliche Gitter - Beschreibung und Messung dimensionaler Qualitätsparameter