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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

DIN EN 62047-9 [CURRENT] references following documents:

Document number Edition Title
IEC 60749-19 2003-02 Semiconductor devices - Mechanical and climatic test methods - Part 19: Die shear strength test More 
IEC 60747-14-1 2010-01 Semiconductor devices - Part 14-1: Semiconductor sensors - Generic specification for sensors More 
IEC 62047-2 2006-08 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials More 
IEC 62047-4 2008-08 Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS More