NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
DIN EN 62047-9 [CURRENT] references following documents:
Document number | Edition | Title |
---|---|---|
IEC 60749-19 | 2003-02 | Semiconductor devices - Mechanical and climatic test methods - Part 19: Die shear strength test More |
IEC 60747-14-1 | 2010-01 | Semiconductor devices - Part 14-1: Semiconductor sensors - Generic specification for sensors More |
IEC 62047-2 | 2006-08 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials More |
IEC 62047-4 | 2008-08 | Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS More |