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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

About DKE Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

IEC 62047-5
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

Title (German)

Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 5: Hochfrequenz-MEMS-Schalter

Edition 2011-07

Original language English , French

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Table of contents

Economic benefits

DIN SPEC

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Terminology

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

IEC 62047-5 Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches

IEC 62047-5
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches