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DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

About DKE Projects Drafts Publications Documents withdrawn without replacement National committees European committees International committees

Standards [CURRENT]

IEC 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS

Title (German)

Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 4: Fachgrundspezifikation für Mikrosystemtechnik

Edition 2008-08

Original language English , French

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Table of contents

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Terminology

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

IEC 62047-4 Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS

IEC 62047-4
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specifications for MEMS