NA 022

DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE

Project

Integrated circuits - Three dimensional integrated circuits - Part 3: A model and measurement conditions of through silicon via (IEC 47A/997/CD:2016)

Abstract

This International Standard specifies a reference model of Through Silicon Via (TSV) electrical characteristics required for an interface design in Three Dimensional Integrated Circuit (3DIC) to transmit and receive digital data and measurement conditions for resistance and capacitance to specify TSV characteristics in 3DIC.

Begin

2017-01-24

Planned document number

DIN EN 63011-3

Project number

02227383

Responsible national committee

DKE/K 631 - Halbleiterbauelemente  

Contact

Elena Rongen

Merianstr. 28
63069 Offenbach am Main

Tel.: +49 69 6308-429

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