NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Project
IEC 61010-2-xxx: Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 2: Particular requirements for semiconductor manufacturing equipment
Begin
2002-04-26
Planned document number
IEC 66/288/NP
Responsible national committee
Responsible international committee
IEC/TC 66 - Safety of measuring, control and laboratory equipment