NA 022
DKE German Commission for Electrical, Electronic & Information Technologies of DIN and VDE
Project
IEC 62047-9,Ed.1: Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
Begin
2008-11-28
Planned document number
IEC 47F/31/CDV
Responsible national committee
DKE/K 631 - Halbleiterbauelemente