Projekt
IEC 62047-21 Ed.1: Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Beginn
2012-08-10
Geplante Dokumentnummer
IEC 47F/127/CD
Zuständiges nationales Arbeitsgremium
DKE/K 631 - Halbleiterbauelemente
