Norm-Entwurf
23/30454374 DC
23/30454374 DC
BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices. Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures
Titel (englisch)
BS EN IEC 62047-47. Semiconductor devices. Micro-electromechanical devices. Part 47. Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures