Norm-Entwurf
23/30454370 DC
23/30454370 DC
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices. Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane
Titel (englisch)
BS EN IEC 62047-46. Semiconductor devices. Micro-electromechanical devices. Part 46. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale membrane