Norm
[AKTUELL]
BS IEC 63068-2
BS IEC 63068-2
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Test method for defects using optical inspection
Titel (englisch)
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices. Test method for defects using optical inspection