Norm [AKTUELL]

UNE-EN 62047-9
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)

Titel (englisch)

Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS (Endorsed by AENOR in June of 2012.)

Ausgabe 2012-06-01
Originalsprache Englisch
Preis ab 73,80 €
Inhaltsverzeichnis